AUTOMATIC MATCHING NETWORK – GGK-AM1

Introduction to adaptation networks In every plasma treatment system, the matching network constitutes a critical component.

The matching network’s purpose is to transform the complex (*) and variable impedance in keeping with the process conditions, in a purely resistive impedance, with a 50 ohm fixed value necessary for the correct operation of the coaxial transmission line and the RF generator. This operation favours the condition of maximum transfer.

The adaptation circuit consists of an ‘L’-type network (but a ‘T’-type configuration can also be chosen) comprising a fixed inductor and a pair of air-variable capacitors. The position of the capacitors is controlled by means of positioning motors.

During operation, commands must be provided via the connector on the front panel.

The matching networks of the GGK-AM1 series provide for the following three methods of operation:

Manual operation, in which the position of the capacitors is a function of an external control
Automatic operation, in which the position of the capacitors varies automatically according to the impedance characteristics of the load
Mixed operation: in which it is possible to keep one of the two capacitors in manual operation and the other in automatic operation.

The second method is fully automatic so, if selected, when the adaptor network detects an RF signal within it, it will automatically search for the optimal operating point in order to achieve maximum power transfer from RF generator to load and does not require the fixed presence of the operator.

The matching network of the GGK-AM1 series consist of an aluminium casing, inside which they are housed:

RF signal conditioning circuits
Interface circuits with external units, with connector and device status indicators
The motors required for capacitor movement

The device is very versatile, as it allows the adaptation of a wide range of load impedances, simply by changing the absolute values of its constituent elements (capacitors and inductor) by means of special ‘pads’ placed inside it.

Product features

Compact size
Easy operation control
Low cost of ownership
Flexible architecture allowing the adaptation of a wide range of impedances. Highly repeatable processes
User interface providing main information (capacitor position, DC-Bias...)
Designed to operate on systems based on 13.56 MHz RF signals

Technical Specifications
Dimensions	L x P x A – Footprint	279 x 400 x 112 mm
	Net Weight	5 Kg
	Respect distances	Right, Left – 100 mm, Retro, Fronte – 200 mm
Facility Service	RF input connector	N-type female
	RF output connector	Maximum output current 15Amp RF, N female input connector, 7/16 output
	Interface connector	DB25 socket
Control Interface	Power supply	24Vdc, 1 A max (Fuse protected T2A)
	Analogue I/O signals	0-10 Vmax
	Digital I/O Signals	24 Vdc – inputs provided with optical isolator
Adapter circuit	Network type	“L’ (optional: other configurations on request)
Adapter circuit	Operating modes	Automatic / Manual / Automatic on single channel
RF Signal	Max output Power	600W
	Frequency	13,56 MHz
	Max. cathode voltage	2000 Vac
	Max. cathode DC current	10A RF
Compliance	International	CE Marked

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