TUCANO, Multipurpose Plasma System Medium bench-top plasma system

TUCANO

TABLE-TOP PLASMA SYSTEM

Tucano represents a vacuum plasma device in tabletop design, capacitive and RF-powered 200W at 13.56MHz. Characterised by its ease of use and simplicity, it is designed for those who need to perform cleaning, modification or activation operations on surfaces of various materials such as metals, plastics, ceramics or paper, as well as for photoresist removal.

It proves to be an ideal option for both clean room R&D and small-scale production.

Among the various treatments that can be implemented, the most significant are:

Semiconductors

Removal of photoresist (stripping) and photoresist residue (descumming), a photosensitive polymer used in photolithographic masking processes.
Organic incineration, isotropic removal of organic polymers (e.g. polyamides, etc.) and Silicon Oxides/Nitrides.
Surface cleaning or modification prior to wire bonding (both bond pads and chip carriers).
Isotropic etching
reverse engineering applications (removal of passivants, decapsulation and delineation of cross sections)

BioMedical

Cleaning and surface modification to obtain hydrophilic or hydrophobic surfaces, which can be used for example in the following application areas:

Prosthetic implants (increased wettability for faster osseointegration)
Bonding between different materials (needles on syringes, catheters, etc.).
Final ultra-cleaning and removal of organic residues at atomic level after classic industrial washing
Sterilisation on heat-sensitive materials

Plastics industry

Cleaning and surface modifications that can be used in the following application areas, for example:

Cleaning surfaces before gluing or welding
Etching of surfaces before deposits or attack of PTFE and other plastics
Activation of surfaces before printing and painting

SEM and TEM microscopy

Sample cleaning and preparation
Removal of very thin organic layers
Hasing of biological tissues
Hasing of asbestos sampling filters

Textile industry

Cleaning and surface modification of natural and synthetic fibres to increase the hydrophilicity of fabrics prior to dyeing or printing;

Precision Mechanics

Atomic final cleaning of metal and ceramic surfaces after industrial washing to improve their paintability or for other types of coatings (e.g. PVD).

Optics and ophthalmics

Final cleaning at atomic level and pre-treatment after industrial washing to improve adhesion of anti-reflective, anti-scratch and similar coatings; curing of anti-scratch and anti-fog layers.
Contact and intraocular lenses

Product features

Desktop plasma system, simple and easy to use
Possibility of storing up to nine recipes
Excellent value for money
Highly repeatable processes
Primary brands components used, such as vacuum gauges and mass flow controllers (MKS Instruments)
Adjustable RF power level in the range 1W to 200W

Technical Specifications
Dimensions	L x P x A – Footprint	482 x 532 x 385 mm
	Net Weight	34Kg
	Respect distances	Right, Left, Front – 600 mm, Retro – 300 mm
Chamber	Material	Aluminum
Chamber	Max Volume	5,9 litri – Ø 153 mm L 324 mm
Electrode	Electrode Configuration	Plane and parallel With dark shield
	Active work area/Sample tray	118 mm x 310 mm
	Electrode gap	68 mm
	Material	Aluminum
RF Signal	Max output Power	200W
RF Signal	Frequency	13,56 MHz
Process Gases	Available flows	5, 10, 20, 50, 100 sccm
Process Gases	Max gases number	2 (Mass Flow Controller from MKS Instruments)
Control Interface	Control	PLC
Control Interface	User Interface	Display Touchscreen
Facility Service	Power supply	Single phase + Earth 220/240 VAC, 8 Amax 50/60 Hz, 13 AWG Single phase + Earth 110/120 VAC, 16 Amax, 50/60 Hz, 10 AWG
	Process Gas inlets, type and dimensions	6 mm OD, Compression Fittings
	Process gas pressure	From 1 bar min. to 1,5 bar max., regulated
	Purge Gas inlets, type and dimensions	6 mm OD, Compression Fittings
	Suggested Purge Gas	N2, Air
	Purge Gas Pressure	From 0.8 bar min. to 1 bar max., regulated
	Exhaust	NW16 ISO-KF
Compliance	International	CE Marked

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GAMBETTI KENOLOGIA SRL

Via A.Volta, 27 | 20082 Binasco Telefono + 39 02 90093082 – Fax + 39 02 9052778 P. IVA IT08000120157

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